The New Jersey Institute of Technology's
Electronic Theses & Dissertations Project

Title:	Modeling and analysis of semiconductor manufacturing processes using petri nets
Author:	Wang, Xinyao
View Online:	njit-etd1993-160 (xii, 78 pages ~ 2.3 MB pdf)
Department:	Department of Electrical and Computer Engineering
Degree:	Master of Science
Program:	Electrical Engineering
Document Type:	Thesis
Advisory Committee:	Zhou, MengChu (Committee chair) Robbi, Anthony D. (Committee member) Wang, David T. (Committee member)
Date:	1993-05
Keywords:	Thin films -- Manufactures -- Analysis Petri nets -- Industrial applications Integrated circuits -- Manufactures -- Analysis
Availability:	Unrestricted
Abstract:	This thesis addresses the issues in modeling and analysis of multichip module (MCM) manufacturing processes using Petri nets. Building such graphical and mathematical models is a crucial step to understand MCM technologies and to enhance their application scope. In this thesis, the application of Petri nets is presented with top-down and bottom-up approaches. The theory of Petri nets is summarized with its basic notations and properties at first. After that, the capability of calculating and analyzing Petri nets with deterministic timing information is extended to meet the requirements of the MCM models. Then, using top-down refining and system decomposition, MCM models are built from an abstract point to concrete systems with timing information. In this process, reduction theory based on a multiple-input-single-output modules for deterministic Petri nets is applied to analyze the cycle time of Petri net models. Besides, this thesis is of significance in its use of the reduction theory which is derived for timed marked graphs - an important class of Petri nets.