The New Jersey Institute of Technology's
Electronic Theses & Dissertations Project

Title:	Design, fabrication and characterization of infrared filters
Author:	Amin, Samiul
View Online:	njit-etd1993-057 (xi, 97 pages ~ 3.7 MB pdf)
Department:	Department of Electrical and Computer Engineering
Degree:	Master of Science
Program:	Electrical Engineering
Document Type:	Thesis
Advisory Committee:	Ravindra, N. M. (Committee chair) Kosonocky, Walter F. (Committee member) Sohn, Kenneth (Committee member)
Date:	1993-10
Keywords:	Light filters Light filters -- Design and construction Thin films -- Optical properties
Availability:	Unrestricted
Abstract:	In-situ temperature monitoring, mapping, and control have become significant in semiconductor processes. Temperature of these processes can be measured by making use of the thermal emission from substrates in the infrared region. Various methods have been proposed to provide multicolor infrared detection. One such method involves placing segmented infrared filters close to the focal plane. The present study aims at gaining an insight into the design, fabrication and characterization of infrared filters. Filters were designed and fabricated with peak transmission at 1.5, 3.0, and 4.5 m. Extensive spectroscopic studies, using FTIR spectroscopy, have been performed in the infrared region, on the materials chosen for the filters - Si, SiO2, and Al2O3. The spectral transmittance characteristics of the filters have also been studied using optical spectrometry to monitor their performance at the desired wavelengths.