The New Jersey Institute of Technology's
Electronic Theses & Dissertations Project

Title:	Chemical vapor deposition of polymeric films
Author:	Yu, Chi
View Online:	njit-etd2004-019 (xii, 83 pages ~ 7.0 MB pdf)
Department:	Committee for the Interdisciplinary Program in Materials Science and Engineering
Degree:	Master of Science
Program:	Materials Science and Engineering
Document Type:	Thesis
Advisory Committee:	Sosnowski, Marek (Committee chair) Grebel, Haim (Committee member) Iqbal, Zafar (Committee member)
Date:	2004-01
Keywords:	Chemical vapor deposition Plasma enhanced chemical vapor deposition Carbon films
Availability:	Unrestricted
Abstract:	Poly-peri-naphthalene (PPN) is a one-dimensional (1 -D) graphite polymer with unique planar ladder-like conjugated molecular structure. PPN was predicted to be a good intrinsic conductor and have high thermal stability and high environmental stability. In this project, chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD) of carbon films with PPN structure using PTCDA as precursor were carried out under different conditions. There is only limited information in literature on the synthesis of PPN films by PECVD process, which may allow deposition at a higher rate with lower substrate temperature. In this work the influence of deposition parameters, such as sublimation temperature, substrate (pyrolysis) temperature, pressure, plasma condition on the structure of deposition product was systematically studied. It's found that the following deposition parameters are required for carbon films containing PPN structure: CVD: sublimation temperature 510°C for PTCDA and substrate temperature around 380°C in atmosphere pressure. This confirms the results of previous studies of this material. PECVD: sublimation temperature and substrate temperature both approximate 350°C, with DC discharge power of several watts, stable plasma in argon gas of approximate 1 torr pressure. In the synthesis of PPN films by both methods, substrate temperature plays an important role that affects quality of the films.