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The New Jersey Institute of Technology's
Electronic Theses & Dissertations Project

Title: Multi-wavelength infrared imaging computer systems and applications
Author: Li, Jun
View Online: njit-etd1997-068
(xv, 147 pages ~ 7.3 MB pdf)
Department: Department of Computer and Information Science
Degree: Doctor of Philosophy
Program: Computer and Information Science
Document Type: Dissertation
Advisory Committee: Hou, Edwin (Committee chair)
Ng, Peter A. (Committee member)
Shi, Yun Q. (Committee member)
Hung, Daochuan (Committee member)
Chang, Timothy Nam (Committee member)
Date: 1997-05
Keywords: Infrared imaging--Data processing.
Thermography.
Availability: Unrestricted
Abstract:

This dissertation presents the development of three computer systems for multi-wavelength thermal imaging.

Two computer systems were developed for the multi-wavelength imaging pyrometers (M-WIPs) that yield non-contact temperature measurements by remotely sensing the surface of objects with unknown wavelength-dependent emissivity. These M-WIP computer systems represent the state-of-art development in remote temperature measurement system based on the multi-wavelength approach. The dissertation research includes M-WIP computer system integration, software development, performance evaluation, and also applications in monitoring and control of temperature distribution of silicon wafers in a rapid thermal process system.

The two M-WIPs are capable of data acquisition, signal processing, system calibration, radiometric measurement, parallel processing and process control. Temperature measurement experiments demonstrated the accuracy of ±1°C against blackbody and ±4°C for colorbody objects. Various algorithms were developed and implemented, including real-time two-point non-uniformity correction, thermal image pseudocoloring, PC to SUN workstation data transfer, automatic IR camera integration time control, and radiometric measurement parallel processing.

A third computer system was developed for the demonstration of a 3-color InGaAs FPA which can provide images with information in three different IR wavelength range simultaneously. Numbers of functions were developed to demonstrate and characterize 3-color FPAs, and the system was delivered to be used by the 3-color FPA manufacturer.


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