The New Jersey Institute of Technology's
Electronic Theses & Dissertations Project

Title:	A silicon knife design and fabrication
Author:	Wang, Mingli
View Online:	njit-etd1995-118 (x, 48 pages ~ 2.7 MB pdf)
Department:	Department of Electrical and Computer Engineering
Degree:	Master of Science
Program:	Electrical Engineering
Document Type:	Thesis
Advisory Committee:	Marcus, Robert Boris (Committee chair) Carr, William N. (Committee member) Misra, Durgamadhab (Committee member)
Date:	1995-05
Keywords:	Silicon knife. Silicon--Oxidation.
Availability:	Unrestricted
Abstract:	In this thesis, the design and fabrication of a silicon knife is described. The device design is based on the principle of oxidation sharpening. The knife is made from a silicon wafer and can be made to be any chosen length up to 150 mm. It was made with the same basic procedures used in semiconductor chip manufacturing. This type of processing/manufacturing results in a knife with a high degree of sharpness and smoothness compared with existing knife technology. The knife fabrication plan combines IC processing, techniques including anisotropic and isotropic etching of silicon, plasma dry etching and chemical etching dry oxidation, and KOH etching.