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The New Jersey Institute of Technology's
Electronic Theses & Dissertations Project

Title: Tantalum silicide variable capacitance rotary micromotors : design and fabrication
Author: Berry, Michael Steven
View Online: njit-etd1993-051
(xii, 83 pages ~ 5.2 MB pdf)
Department: Department of Electrical and Computer Engineering
Degree: Master of Science
Program: Electrical Engineering
Document Type: Thesis
Advisory Committee: Carr, William N. (Committee chair)
Misra, Durgamadhab (Committee member)
Ravindra, N. M. (Committee member)
Grieco, Michael J. (Committee member)
Date: 1993-05
Keywords: Tantalum Silicide.
Capacitor motors--Design and construction.
Availability: Unrestricted
Abstract:

Tantalum silicide was studied as an alternative microelectromechanical material by fabricating a rotary micromotor utilizing a proven design. This material was used for the rotor, stators, and bearing over a silicon substrate. It has the attraction of potentially reducing the friction which is a major problem with polysilicon-to-polysilicon bearings.

The necessity of high aspect ratio features required that a plasma or reactive ion etch with a high degree of anisotropy be developed to etch tantalum silicide films in excess of 1.5μm. A sulfur hexafluoride/Freon 115 plasma provided the necessary process control during the etches. The stress present in annealed tantalum silicide films made it necessary to limit the maximum processing temperature to 300°C. These low temperature tantalum silicide films have thus far proved to be inadequate as a microelectromechanical material for the micromotor due to their inability to withstand the hydrofluoric acid release etch.


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